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MEMS Fabrication

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Plasma deposition: SPT-330H, manufacturer : Plasmionique



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Mask aligner: 800MBA, manufacturer : OAI



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Wet bench with DI water generator, manufacturer: STC



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Resin deposition: WS-400BZ-6NPP/LITE, manufacturer: Laurell


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Direct exposition system: SF100, manufacturer: Intelligent Micro patterning



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IBE-RIE: Nanoquest I, manufacturer: Intelvac



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CMP: RBPo-6, manufacturer: Rtec Instruments